EANS-News: SEMATECH and centrotherm Partner to Develop Low Temperature Processes
for Future CMOS and Memory Devices
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Company Information
Subtitle: Joint effort to extend the technology roadmap for enabling
process technologies
Partnership is part of centrotherms strategy to expand the semiconductor
segment
Blaubeuren (euro adhoc) - April 10, 2012 - SEMATECH today announced that
centrotherm thermal solutions, a 100% subsidiary of centrotherm photovoltaics AG
and a developer of process tools and high-tech production systems for the
manufacture of semiconductor components, has joined its Front End Processes
(FEP) program, and will work with SEMATECH to develop new low temperature
processing techniques for future high-performance logic and memory devices.
Continued scaling will require new materials and new device concepts that
necessitate lower thermal budget process flows. For example, to enable the
introduction of high mobility semiconductors as the channel material of
transistors, low temperature processes are critical to preserve the beneficial
properties of channel materials. Similarly, advanced memory technologies
require superior isolation as well as low thermal budget oxidation approaches -
especially for metal oxide RRAM devices. Plasma-based processing techniques
offer an attractive approach to help realize such low-thermal budget processes
to enable the integration of new materials into emerging device technologies.
As a member of this program, centrotherm will closely collaborate with experts
from SEMATECH´s FEP research team, to develop plasma-based low temperature
techniques using SEMATECH test structures. The goal of this team would be to
demonstrate their applicability towards usage in high performance logic
transistors and memory devices in sub 14 nm advanced technology nodes.
"SEMATECH provides centrotherm with an excellent test device and
characterization platform to help centrotherm identify and demonstrate
applications for our tool," said Peter Augustin, CEO of centrotherm thermal
solutions GmbH & Co. KG. "This collaboration will enable centrotherm to
showcase low temperature processing capabilities to our customers and is part
of our ct focus program to expand our Semiconductors & Microelectronics area."
"SEMATECH is pleased to welcome centrotherm as a partner," said Raj Jammy,
SEMATECH´s vice president of emerging technologies. "centrotherm´s unique
expertise in thermal solutions will complement our own device and process
expertise. We will work together to develop practical and promising
manufacturable solutions to address the emerging needs of the advanced
transistor and memory markets."
The goal of SEMATECH´s FEP program is to provide novel leading-edge materials,
processes, structural modules and electrical and physical characterization
methods to support the continued scaling of logic and memory applications.
About centrotherm
centrotherm thermal solutions GmbH & Co. KG, a 100% subsidiary of centrotherm
photovoltaics AG, develop processes and high-tech production systems for the
manufacture of semiconductor components. In addition to the processes and
technology, centrotherm´s core area of expertise also covers the construction
and design of products. They find use in a wide range of thermally-activated
processes in various technologies and applications (e.g. power semiconductors,
LEDs, micromechanics, MEMS, sensor technology).
centrotherm photovoltaics AG, which is based at Blaubeuren, Germany, is one of
the world's leading technology and equipment provider for the photovoltaics
sector. The company equips well-known solar companies and new sector entrants
with turnkey production lines and single equipment to manufacture silicon,
crystalline solar cells and thin film modules. As a consequence, the Group
possesses a broad and well-founded technological basis, as well as key
equipment at practically all steps of the photovoltaics value chain.
centrotherm photovoltaics guarantees its customers important performance
parameters such as production capacity, efficiencies, and completion deadlines.
The Group employed around 1,900 staff as of the December 31, 2011 reporting
date, and operates globally in Europe, Asia and the USA. centrotherm
photovoltaics achieved revenue in the 2011 financial year of around EUR 700
million. The company is listed in the TecDAX index on the Frankfurt Stock
Exchange. For more information see www.centrotherm.de.
About SEMATECH:
SEMATECH®, the international consortium of leading semiconductor device,
equipment, and materials manufacturers, this year celebrates 25 years of
excellence in accelerating the commercialization of technology innovations into
manufacturing solutions. Through our unwavering commitment to foster
collaboration across the nanoelectronics industry, we help our members and
partners address critical industry transitions, drive technical consensus, pull
research into the industry mainstream, improve manufacturing productivity, and
reduce risk and time to market. Information about SEMATECH can be found
at www.sematech.org.
Contact:
SEMATECH®
Erica McGill
001-518-649-1041
E-Mail: erica.mcgill@sematech.org
centrotherm
Saskia Feil
Senior Manager Investor & Public Relations
Tel: +49 7344 918-8890
E-mail: saskia.feil@centrotherm.de
Dr. Torsten Knödler
Manager Public Relations
Tel: +49 7344 918-8898
E-mail: torsten.knoedler@centrotherm.de
Further inquiry note:
Dr. Torsten Knödler
Manager Public Relations
Tel.: 07344 - 918-8898
E-Mail: torsten.knoedler@centrotherm.de
end of announcement euro adhoc
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company: centrotherm photovoltaics AG
Johannes-Schmid-Str. 8
D-89143 Blaubeuren
phone: +49 (0) 7344 91880
mail: info@centrotherm.de
WWW: http://www.centrotherm.de
sector: Energy
ISIN: DE000A0JMMN2
indexes: TecDAX
stockmarkets: free trade: Berlin, München, Hamburg, Düsseldorf, Stuttgart,
regulated dealing/prime standard: Frankfurt
language: English